Thin Films and Physics of Nanostructures

Thin Films
&
Physics of Nanostructures

New materials and devices for IT, Health and Energy

© Universität Bielefeld

Equipment

we operate a large number of techniques for the preparation of thin films and bulk materials as well as for their characterization. In addition, we have nanomachining systems such as e-beam lithography or focussed ion beam milling. Here, you can find the most important systems:

Thin film deposition

	Sentech atomic layer deposition thermal and plasma enhanced deposition four precursor gases up to 100mm samples from room temperature up to 300℃ extremely uniform and conform oxide- and nitride-layers
	BesTec 3 inch Co-Sputtering System sputter deposition 8 sources, 3", DC or RF mode ultra high vacuum sample heating (1000°C), rotation 10 kW electron beam evaporator 1kW rapid thermal annealing unit
	Leybold CLAB600 sputter deposition 6 sources, 4", DC or RF mode high vacuum automatic sample handling plasma oxidation chamber
	BesTec 2 inch Co-Sputtering System sputter deposition 4 sources, 2", DC or RF mode ultra high vacuum sample heating (1000°C), rotation
	Molecular Beam Epitaxy & Leybold CLAB560 4 sources, 4", DC or RF mode 4 Knudsen cells for co-deposition electron beam evaporation sample heating (1000°C) ultra high vacuum
	Insulator Sputtering DC or RF reactive sputtering ultra high vacuum TaOx, SiO2, Ta, Au
	Clean Room wet bench, spin coating UV lithography with masks Heidelberg Instruments DWL66 laser lithography with CAD control
	Ion Beam Etching low-voltage ion beam (up to 1.2keV) ultra high vacuum secondary ion mass spectroscopy (SIMS)
	FEI Helios NanoLab DualBeam Focused Ion Beam Ga ion beam nano-manipulator scanning electron microscope EDX for mapping 3D tomography
	Zeiss LEO 1530 Scanning Electron Microscope 5-20kV operating voltage high vacuum EDX detector Raith laser interferometer sample stage for electron beam lithography
	Annealing Furnace up to 550°C ultra high vacuum field cooling (0.65T)
	TPT HB 16 Bonder Al or Au wire Ball and wedge bonding

Analytics

	Philips X'Pert Pro MPD x-ray diffractometer Theta-Theta geometry Cu Ka source Bragg-Brentano optics open Euler cradle LN2 chamber for cryo measurements x-ray reflectivity (XRR) small angle x-ray scattering (SAXS)
	Amptek XR-100CR x-ray fluorescence detector upgrade for Philips X'Pert diffractometer Cu source He enclosure for elements down to Al no LN2
	Auger Electron Microscope Ar ion gun for depth profiling
	Vector and 2T MOKE 3-axis magnet (0.35T) perpendicular or 45° incident light sample rotation and heating Kerr rotation and ellipticity different wavelengths Bruker electromagnet (up to 2T) polar and longitudinal geometry 650nm Laser s- or p-polarized incident light
	Cryogenic Ltd. Cryostat closed cycle He cryostat (1.2 K) 3He dilution insert (0.3K) 4T superconducting magnet
	Thermal Gradients Setup rotating magnetic field and temperature gradient up to 0.1 T magnetic field, ΔT 30 K thermal camera
	Princeton MicroMag Alternating Gradient Magnetometer Magnetic Field: 1.4T cryo insert for LN2 or LHe, sample heating
	Atomic Force Microscope Broker Multimode 5 Tapping Mode, Contact Mode Magnetic Force Mode (MFM) Conducting AFM

Group leaders
Research topics

Prof. Dr. Andreas Hütten
Magnetic materials, nanoparticles, biosensors and special alloys [more...]

Jun.Prof.'in Dr. Luana Caron
Magnetocaloric materials and devices, nanostructured materials [more...]

PD Dr. Timo Kuschel
Spin transport, spin caloritronics, magnetooptics, x-ray resonant magnetic reflectivity [more...]

Sen. Prof. Dr. Günter Reiss
Spinelectronics, quantumtransport, sensor- and memory-devices [more...]

Dr. Inga Ennen
In operando analytical high resolution transmission electron microscopy [more...]

Staff

Dr. Jan Schmalhorst
Senior scientist, deposition and characterization of thin film systems, Web of Science ResearcherID

Dr. Karsten Rott
Tunneling devices, optical and e-beam lithography
Former members:

Prof.'in Dr. Gabi Schierning (Uni Duisburg Essen): Thermoelectric materials and devices, quantumtransport

Prof. Dr. Markus Meinert (TU Darmstadt): Electronic structure of spintronic materials [more]

PD Dr. Andy Thomas (IFW and TU Dresden): Tunneling and memristive devices, neuromophic systems [more]

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Thin Films & Physics of Nanostructures

Equipment

Thin film deposition

Sentech atomic layer deposition

BesTec 3 inch Co-Sputtering System

Leybold CLAB600

BesTec 2 inch Co-Sputtering System

Molecular Beam Epitaxy & Leybold CLAB560

Insulator Sputtering

Clean Room

Ion Beam Etching

FEI Helios NanoLab DualBeamFocused Ion Beam

Zeiss LEO 1530Scanning Electron Microscope

Annealing Furnace

TPT HB 16 Bonder

Analytics

Philips X'Pert Pro MPDx-ray diffractometer

Amptek XR-100CRx-ray fluorescence detector

Auger Electron Microscope

Vector and 2T MOKE

Cryogenic Ltd.Cryostat

Thermal Gradients Setup

Princeton MicroMagAlternating Gradient Magnetometer

Atomic Force Microscope Broker Multimode 5

Group leaders Research topics

Staff

Thin Films
&
Physics of Nanostructures

FEI Helios NanoLab DualBeam
Focused Ion Beam

Zeiss LEO 1530
Scanning Electron Microscope

Philips X'Pert Pro MPD
x-ray diffractometer

Amptek XR-100CR
x-ray fluorescence detector

Cryogenic Ltd.
Cryostat

Princeton MicroMag
Alternating Gradient Magnetometer

Group leaders
Research topics